发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To improve performance of a semiconductor device.SOLUTION: A semiconductor device comprises: an electrode 16 and a dummy electrode DE which are formed on a semiconductor substrate away from each other; an electrode 23 formed between the electrode 16 and the dummy electrode DE, on a peripheral side surface of the electrode 16 and on a peripheral side surface of the dummy electrode DE; and a capacitative insulation film 27 formed between the electrode 16 and the electrode 23. The electrode 16, the electrode 23 and the capacitative insulation film 27 form a capacitative element. The semiconductor device further comprises: a plug PG1 which pierces an interlayer insulation film 34 and is electrically connected with the electrode 16; and a plug PG2 which pierces the interlayer insulation film 34 and is electrically connected with a portion of the electrode 23, which is formed on a lateral face of the dummy electrode DE on the side opposite to the electrode 16 side.
申请公布号 JP2014229844(A) 申请公布日期 2014.12.08
申请号 JP20130110476 申请日期 2013.05.27
申请人 RENESAS ELECTRONICS CORP 发明人 ISHII YASUYUKI;CHAGIHARA HIROSHI
分类号 H01L21/822;H01L21/336;H01L21/8247;H01L27/04;H01L27/10;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/822
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