REFLECTION ELECTRON DETECTOR

摘要

PROBLEM TO BE SOLVED: To provide a reflection electron detector which is suitable for achieving a method for determining in advance whether or not an X-ray detector can obtain an accurate X-ray detection image in any region of a sample and can perform proper analysis.SOLUTION: A Coax-BSE detector 15 which is a reflection electron detector includes: a BSE element 153; a support member 152 which supports the BSE element; and a fixing member 151 for fixing the support member 152 to an X-ray detector 12. The fixing member 151 fixes the support member 152 by fastening a side part on the tip side which is an X-ray receiving part side of a housing 121 covering the X-ray detector 12.