SUBSTRATE TRANSFER UNIT FOR DEPOSITION, APPARATUS FOR ORGANIC LAYER DEPOSITION COMPRISING THE SAME, AND METHOD FOR MANUFACTURING OF ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME

摘要

Provided are a substrate transfer part for deposition, an apparatus for depositing an organic layer comprising the same, and a method for manufacturing an organic light emitting display apparatus using the same. To provide a substrate transfer part for deposition which accurately deposits a deposition material on a substrate, an apparatus for depositing an organic layer comprising the same, and a method for manufacturing an organic light emitting display apparatus using the same, a carrier includes an electrostatic chuck which fixes a substrate to one surface, receiving parts which are combined with the other surface of the electrostatic chuck to move the electrostatic chuck in a first direction and are formed inside, and a reinforcement rib which is formed on a surface of each receiving part.