| 摘要 |
<p>According to the present invention, an inspection system using a scanning electron microscope comprises: a scanning electron microscope chamber inspecting a target using an electron beam, and maintaining a vacuum state; an infrared spectrometer attached to the scanning electron microscope chamber analyzing organic impurities by irradiating infrared rays to the target; a stage separated from the lower side of the scanning electron microscope chamber having the target mounted thereon; and a transfer unit transferring the scanning electron microscope chamber and the infrared spectrometer on stage, wherein the scanning electron microscope chamber and the target are capable of maintaining a standby state therebetween. Therefore, without destroying a large target in order to analyze the large target, the inspection system in accordance to the present invention is capable of inspecting the large target, thereby reducing the initial costs and improving yield.</p> |
