发明名称 |
METHOD FOR FORMING OXIDE THIN FILM AND METHOD FOR FABRICATING OXIDE THIN FILM TRANSISTOR IMPLEMENTING CHANNEL DOPING AND PASSIVATION IN ONE STEP |
摘要 |
<p>The present invention relates to a method for forming an oxide thin film and a method for fabricating an oxide thin film transistor and, more specifically, to a method for forming an oxide thin film and a method for fabricating an oxide thin film transistor performing channel doping and passivation at the same time. The method for forming an oxide thin film according to an embodiment of the present invention can comprise the following steps of: forming a first oxide thin film containing indium; forming a second oxide thin film containing at least one among aluminum, zirconium, and hafnium on the first oxide thin film; and performing a heat treatment for the first and second oxide thin films.</p> |
申请公布号 |
KR101465114(B1) |
申请公布日期 |
2014.12.05 |
申请号 |
KR20130078510 |
申请日期 |
2013.07.04 |
申请人 |
INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY |
发明人 |
KIM, HYUN JAE;KIM, JUNG HYUN;RIM, YOU SEUNG |
分类号 |
H01L21/316;H01L21/336;H01L29/786 |
主分类号 |
H01L21/316 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|