发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device is configured to be able to suppress reduction in electric characteristics which becomes remarkable in association with miniaturization.SOLUTION: The semiconductor device is configured to comprise: a first oxide semiconductor layer formed on an insulating surface; a second oxide semiconductor layer which is formed on the first oxide semiconductor layer, and has a smaller area than that of the first oxide semiconductor layer, and entirely overlaps with the first oxide semiconductor layer; a source and a drain electrode layers which each have one surface in contact with a part of each of the first and second oxide semiconductor layers; a third oxide semiconductor layer which is formed on the first and second oxide semiconductor layers and partially overlaps with the other surfaces of the source and drain electrode layers; a gate insulating film formed on the third oxide semiconductor layer; and a gate electrode layer formed on the gate insulating film.
申请公布号 JP2014225652(A) 申请公布日期 2014.12.04
申请号 JP20140081528 申请日期 2014.04.11
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;SAKAKURA MASAYUKI;SUZAWA HIDEOMI
分类号 H01L29/786;H01L21/28;H01L21/8234;H01L21/8242;H01L27/088;H01L27/108 主分类号 H01L29/786
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