| 摘要 |
Provided are a method and an apparatus for determining which piece of equipment among equipment through which faulty products of a faulty sample have passed through is problematic, by using a defect map of an entire faulty sample comprising the faulty product. The method for determining the problematic equipment according to the present invention comprises the steps of: generating a sample defect map expressing a defect distribution of each cell of the faulty sample, which is a group of products divided into a plurality of cells; generating an equipment defect map for at least one piece of equipment from among the equipment through which the products of the faulty sample have passed through, wherein the equipment defect map for a specific piece of equipment expresses the defect distribution of each of the cells in the product which ha passed through the specific piece of equipment, from among the products in the faulty sample; calculating the map similarity between the sample defect map and the equipment defect map, with respect to each piece of equipment for which the equipment defect map has been generated; and determining the problematic equipment with respect to the faulty sample based on the map similarity for each of the pieces of equipment. |
