发明名称 SAMPLE SAMPLING DEVICE, SAMPLE SAMPLING METHOD, AND SAMPLE SAMPLING ANALYSIS SYSTEM
摘要 Disclosed are a sample sampling device, a sample sampling method using the same, and a sample sampling analysis system. The sample sampling device comprises: a spray unit for receiving a trapping solution and an analysis sample so as to mix and spray the solution and the sample in an aerosol state; a spray chamber for providing a space for allowing analysis materials contained in the analysis sample to be primarily collected in the trapping solution which is in the aerosol state; a trapping tube for receiving the trapping solution in the aerosol state and the analysis sample from the spray chamber so as to mix and contact the solution and the sample, and for secondarily collecting analysis materials which are not collected in the spray chamber; a trapping container for accommodating the trapping solution, in which the analysis materials are collected, through the trapping tube; and a sample transfer part for providing purge gas to the inside of the trapping container such that the trapping solution having the collected analysis materials is provided to an analysis unit through a sample transfer line.
申请公布号 WO2014193155(A1) 申请公布日期 2014.12.04
申请号 WO2014KR04742 申请日期 2014.05.27
申请人 NVISANA CO., LTD. 发明人 JUN, PIL-KWON;SUNG, YONG-IK;PARK, JUN-CHEOL
分类号 G01N1/22;H01L21/66 主分类号 G01N1/22
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