发明名称 TESTING DEVICE AND TESTING METHOD FOR SEMICONDUCTOR CHIP
摘要 PROBLEM TO BE SOLVED: To provide a testing device and a testing method for a semiconductor chip, which can improve quality of an IPM (Intelligent Power Module) and reduce failure cost of the IPM.SOLUTION: Provided is a testing device 100 of a semiconductor chip 20, which can measure overshoot of dynamic avalanche current Iavds of a sense part 32 by providing a sense resistor 6 for detecting a sense current Is of the semiconductor chip 20 having the sense part 33 and a voltage measuring instrument 7 for measuring a voltage generated at the sense resistor 6. A testing method for a semiconductor chip, of measuring existence or non-existence of overshoot of a sense voltage Vs by using the testing device 100 and determining the semiconductor chip 20 having overshoot to be defective can improve quality of an IPM assembled with a non-defective semiconductor chip and reduce failure cost.
申请公布号 JP2014225607(A) 申请公布日期 2014.12.04
申请号 JP20130104974 申请日期 2013.05.17
申请人 FUJI ELECTRIC CO LTD 发明人 MORI TOMOAYA
分类号 H01L21/336;G01R31/26;H01L21/66;H01L27/04;H01L29/739;H01L29/78 主分类号 H01L21/336
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