| 摘要 |
PROBLEM TO BE SOLVED: To prevent dimples from being caused by processing a plate-like object and thereby improve the processing quality.SOLUTION: When a rear surface 22 of a plate-like object where a protection member 40 is disposed on a surface 23 is processed, the rear surface 22 of the plate-like object is suctioned and held by using carrying-out means 12 having a suction holding part 126, which suctions and holds the plate-like object in a carrying-out step, to carry out the plate-like object 20 from a cassette 30a where the plate-like object is stored. Next, in a holding step, the surface 23 side of the plate-like object carried out from the cassette 30a in the carrying-out step is held by using a holding table through the protection member 40. Then, in a processing step, the rear surface 22 side of the plate-like object held by the holding step is processed by using grinding means or polishing means. Since the rear surface 22 of the plate-like object is held in the carrying-out step, foreign objects are prevented from entering into a space between the protection member 40 and the holding table in the holding step and thus dimples do not occur in the plate-like object. |
