发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR CHIP WITH ADHESIVE LAYER AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor chip with a thin adhesive layer, capable of miniaturizing a semiconductor device.SOLUTION: The method of manufacturing a semiconductor chip with an adhesive layer comprises: a coating step of applying an adhesive composition containing a solvent onto one surface of a semiconductor wafer having a circuit on the other surface; an adhesive layer forming step of removing the solvent in the adhesive composition to form an adhesive layer; and a cutting step of cutting the semiconductor wafer having the adhesive layer formed thereon to obtain a semiconductor chip with the adhesive layer. The adhesive composition contains (A) a thermoplastic resin, (B) a thermosetting resin, (C) the solvent removable by heating, and an inorganic filler. The content of the inorganic filler is 1-1,000 pts.mass based on 100 pts.mass of the thermoplastic resin (A).
申请公布号 JP2014225682(A) 申请公布日期 2014.12.04
申请号 JP20140143602 申请日期 2014.07.11
申请人 HITACHI CHEMICAL CO LTD 发明人 KAWAMORI TAKASHI;MITSUKURA KAZUYUKI;MASUKO TAKASHI;KATOGI SHIGEKI;FUJII SHINJIRO
分类号 H01L21/52;C09J11/04;C09J179/08;C09J201/00 主分类号 H01L21/52
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