ROBOT ARM CONTROL APPARATUS, SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESSING APPARATUS, ROBOT ARM CONTROL METHOD, AND PROGRAM

摘要

A robot arm control apparatus for controlling the operation of a robot arm device having at least two arm portions and at least two rotational joints configured to rotate the arm portions includes a control unit configured to control rotation of the joints to move generally rectilinearly the distal end of a predetermined arm portion of the arm portions except the most proximal arm portion thereof. The control unit controls the rotation of the joints so that the motion acceleration of the distal end of the predetermined arm portion when the distal end is moved generally rectilinearly results in coincidence with a predetermined temporal transition. The motion acceleration with the predetermined temporal transition is such that, when the motion acceleration is expressed as a function of time, a derivative obtained by differentiating the function with respect to the time shows a continuous transition with respect to changes in the time.

主权项

1. A robot arm control apparatus for controlling an operation of a robot arm device having at least two arm portions and at least two rotational joints configured to rotate the at least two arm portions, respectively, the robot arm control apparatus comprising:
a control unit configured to control rotation of the at least two rotational joints to move generally rectilinearly a distal end of a predetermined arm portion of the at least two arm portions except a most proximal arm portion thereof, the control unit controlling the rotation of the at least two rotational joints so that a motion acceleration of the distal end of the predetermined arm portion when the distal end is moved generally rectilinearly results in coincidence with a predetermined temporal transition; wherein the motion acceleration with the predetermined temporal transition is such that, when the motion acceleration is expressed as a function of time, a derivative obtained by differentiating the function with respect to the time shows a continuous transition with respect to changes in the time.