| 摘要 |
The present invention addresses the problem of providing an X-ray fluorescence analyzer capable of restraining reduction in analysis accuracy for light elements having atomic numbers lower than 23 and making a helium gas conversion operation within an analysis chamber more efficient. This X-ray fluorescence analyzer is provided with an X-ray tube (12) for irradiating primary X-rays onto a sample (S) on a sample stage (14) having an X-ray passage port (141), a detector (13) for detecting X-ray fluorescence emitted by the sample (S), an analysis chamber (16) having an inlet port (17) for the primary X rays from the X-ray tube (12) and a detection port (181) for the detector (13) and having therein a light path for the primary X-rays traveling from the inlet port (17) to the X-ray passage port (141) and a light path for the X-ray fluorescence traveling from the X-ray passage port (141) to the detection port (181), first and second introduction tubes (201, 202) for introducing helium gas supplied from a helium gas cylinder (22) into the analysis chamber (16) via the inlet port (17) and the detection port (181), and a flow rate control valve (24) for controlling the flow rate of the helium gas flowing through the first and second introduction tubes (201, 202). |
