发明名称 PROCESSING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a processing method with high productivity.SOLUTION: A method for processing a workpiece (2) comprises the steps of: forming a water-soluble protective film (36) on a surface (2a) of the workpiece (water-soluble protective film forming step); forming a laser processing groove (44) by irradiating the surface of the workpiece with a laser beam (42) after performing the water-soluble protective film forming step (laser processing step); and cutting the workpiece in which the water-soluble protective film is formed with a cutting blade (48) along the laser processing groove of the workpiece while supplying cutting water to the cutting blade after performing the laser processing step (cutting step).
申请公布号 JP2014225519(A) 申请公布日期 2014.12.04
申请号 JP20130103275 申请日期 2013.05.15
申请人 DISCO ABRASIVE SYST LTD 发明人 HANASHIMA SATOSHI
分类号 H01L21/301;B24B27/06 主分类号 H01L21/301
代理机构 代理人
主权项
地址