| 摘要 |
To change the position of the beam is used electromechanical change of the position of electron cannon (6) placed outside of the vacuum chamber (2), whereby by sealing elements (3) is maintaining the tightness of the connection cannon (6) to the chamber. By using actuators (9) and (10) in the drive readjustment is made possible through electronic links to perform on-line change in position of the outer electron beam cannon (6) and possibly combine them with controlled deflection of the beam. |
