| 发明名称 |
METAL WIRES OF A STACKED INDUCTOR |
| 摘要 |
A method including forming a first metal wire in a first dielectric layer, the first metal wire including a first vertical side opposite from a second vertical side; and forming a second metal wire in a second dielectric layer above the first dielectric layer, the second metal wire including a third vertical side opposite from a fourth vertical side, where the first vertical side is laterally offset from the third vertical side by a first predetermined distance, and the second vertical side is laterally offset from the fourth vertical side by a second predetermined distance, where the first metal wire and the second metal wire are in direct contact with one another. |
| 申请公布号 |
US2014354392(A1) |
申请公布日期 |
2014.12.04 |
| 申请号 |
US201313909464 |
申请日期 |
2013.06.04 |
| 申请人 |
International Business Machines Corporation |
发明人 |
Cooney, III Edward C.;Dang Dinh;DeMuynck David A.;McTaggart Sarah A.;Milo Gary L.;Roma Melissa J.;Thompson Jeffrey L.;Weeks Thomas W. |
| 分类号 |
H01L49/02 |
主分类号 |
H01L49/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method comprising:
forming a first metal wire in a first dielectric layer, the first metal wire comprising a first vertical side opposite from a second vertical side; and forming a second metal wire in a second dielectric layer above the first dielectric layer, the second metal wire comprising a third vertical side opposite from a fourth vertical side, wherein the first vertical side is laterally offset from the third vertical side by a first predetermined distance, and the second vertical side is laterally offset from the fourth vertical side by a second predetermined distance, wherein the first metal wire and the second metal wire are in direct contact with one another. |
| 地址 |
Armonk NY US |
