发明名称 |
CRUCIBLE APPARATUS AND DEPOSITION APPARATUS WITH THE SAME |
摘要 |
A crucible apparatus comprises: a crucible having an opening, the crucible being configured to store an organic material; a heating device surrounding the exterior of the crucible, the heating device being configured to provide heat to the crucible; at least one thermal ball configured to deliver the heat provided by the heating device to the organic material within the crucible so as to sublimate the organic material; and at least one spray nozzle disposed at the opening of the crucible and configured to spray the sublimated organic material. |
申请公布号 |
US2014352616(A1) |
申请公布日期 |
2014.12.04 |
申请号 |
US201414185246 |
申请日期 |
2014.02.20 |
申请人 |
Samsung Display Co., Ltd. |
发明人 |
Lee Su-Hwan;Kim Mu-Hyun;Kim Eun-Ho |
分类号 |
C23C14/24;C23C14/14;B05C5/00;C23C14/12 |
主分类号 |
C23C14/24 |
代理机构 |
|
代理人 |
|
主权项 |
1. A crucible apparatus, comprising:
a crucible having an opening, the crucible being configured to store an organic material; a heating device surrounding an exterior of the crucible, the heating device being configured to provide heat to the crucible; at least one thermal ball configured to deliver the heat provided by the heating device to the organic material within the crucible so as to sublimate the organic material; and at least one spray nozzle disposed at the opening of the crucible, said at least one spray nozzle being configured to spray the sublimated organic material. |
地址 |
Yongin-City KR |