| 摘要 |
The present invention relates to a substrate adsorbing device of a light exposure apparatus for a printed circuit board, comprising an XYZ&thgr; axis stage; and a platen installed on the upper part of the XYZ&thgr; axis stage to be moved in an XYZ&thgr; direction by the XYZ&thgr; axis stage and adsorbs the substrate on which printed circuit patterns are formed, wherein the platen comprises: a platen base installed on the upper part of the XYZ&thgr; axis stage and having an open groove on the surface of the upper part; and a porous adsorption substrate installed on the upper part of the platen base and having a plurality of nanoholes arranged and connected to the open groove through which air flows in and out. |
