| 摘要 |
PROBLEM TO BE SOLVED: To provide an imaging performance evaluation device capable of discriminating aberration highly accurately without using a photodetector having a wide dynamic range.SOLUTION: An imaging performance evaluation device is constituted so that a rectangular beam having each different angle to the optical axis is radiated to an imaging optical system 2 from a rectangular beam generation device 1, by mounting on the rectangular beam generation device 1, a rotating mechanism 14 for rotating the rectangular beam around the optical axis of the imaging optical system 2. |
