发明名称 Power module comprising two substrates and method of manufacturing the same
摘要 A method of manufacturing a power module comprising two substrates is provided, wherein the method comprises disposing a compensation layer of a first thickness above a first substrate; disposing a second substrate above the compensation layer; and reducing the thickness of the compensation layer from the first thickness to a second thickness after the second substrate is disposed on the compensation layer
申请公布号 US2014353818(A1) 申请公布日期 2014.12.04
申请号 US201313909133 申请日期 2013.06.04
申请人 Infineon Technologies AG 发明人 GEITNER Ottmar;HABLE Wolfram;Grassmann Andreas;Winter Frank;Neugirg Christian;Nikitin Ivan
分类号 H01L21/56;H01L23/00;H01L23/31 主分类号 H01L21/56
代理机构 代理人
主权项 1. A method of manufacturing a power module comprising two substrates, the method comprising: disposing a compensation layer of a first thickness above a first substrate; disposing a second substrate above the compensation layer; and reducing the thickness of the compensation layer from the first thickness to a second thickness after the second substrate is disposed on the compensation layer.
地址 Neubiberg DE