NORMAL-INCIDENCE BROADBAND SPECTROSCOPIC POLARIMETER CONTAINING REFERENCE BEAM AND OPTICAL MEASUREMENT SYSTEM

摘要

Disclosed is a normal-incidence broadband spectroscopic polarimeter containing reference beam, comprising a light source, a first reflecting unit, a first concentrating unit, a second concentrating unit, a polarizer, a first curved mirror, a first planar mirror, a second reflecting unit and a probing unit. Also disclosed is an optical measurement system, comprising the normal-incidence broadband spectroscopic polarimeter containing reference beam. The normal-incidence broadband spectroscopic polarimeter containing reference beam achieves an integral combination of the light beams after splitting, can maintain the polarization state of the light beams while increasing the light transmission efficiency, and has a low complexity.

主权项

1. A normal-incidence broadband spectroscopic polarimeter containing reference beam, comprising: a light source, a first reflecting unit, a first concentrating unit, a second concentrating unit, a polarizer, a first curved mirror, a first planar mirror, a second reflecting unit and a probing unit, wherein
the first reflecting unit is used for splitting light emitted from the light source into a probing beam and a reference beam, and making the probing beam incident on the first concentrating unit, and making the reference beam incident on the second concentrating unit; the first concentrating unit is used for receiving the probing beam, and making the beam incident on the polarizer after becoming a parallel beam; the polarizer is provided between the first concentrating unit and the first curved mirror, and used for making the parallel beam pass there through and incident on the first curved mirror; the first curved mirror is used for receiving the parallel beam passing through the polarizer and making the beam be a focused beam; the first planar mirror is used for receiving the focused beam and reflecting the focused beam to focus on a sample perpendicularly; the second concentrating unit is used for receiving the reference beam, and making the reference beam incident on the second reflecting unit; the second reflecting unit is used for receiving the probing beam reflected by the sample and passing through the planar mirror, the first curved mirror, the polarizer, and the first concentrating unit in order and the reference beam passing through the second concentrating unit respectively or simultaneously, and making the received beams incident on the probing unit; and the probing unit is used for probing the beam reflected by the second reflecting unit.