THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS USING THE SAME

摘要

A method of manufacturing an organic light-emitting display apparatus includes: forming light-emitting regions on a substrate; forming an organic light-emitting layer on the light-emitting regions; forming a counter electrode on the organic light-emitting layer; and forming an auxiliary electrode electrically connected to the counter electrode. A thickness of the auxiliary electrode is different from a thickness of the counter electrode. Formation of the counter electrode and formation of the auxiliary electrode are achieved via a small mask scanning (SMS) deposition method using the same mask.

主权项

1. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
forming light-emitting regions on a substrate; forming an organic light-emitting layer on the light-emitting regions; forming a counter electrode on the organic light-emitting layer; and forming an auxiliary electrode electrically connected to the counter electrode, wherein a thickness of the auxiliary electrode is different from a thickness of the counter electrode, and wherein formation of the counter electrode and formation of the auxiliary electrode are achieved via a small mask scanning (SMS) deposition method using the same mask.