发明名称 |
ACOUSTIC WAVE DEVICE AND METHOD OF FABRICATING THE SAME |
摘要 |
An acoustic wave device includes: a support substrate; a piezoelectric substrate; and a cap substrate, wherein the cap substrate includes a first region located along an outer peripheral portion of the cap substrate, a second region located along an inside of the first region and having a thickness less than a thickness of the first region, and a third region located inside the second region and having a thickness less than a thickness of the second region, and a surface of the first region is bonded to the surface of the outer peripheral portion of the support substrate, a surface of the second region is bonded to a surface of an outer peripheral portion of the piezoelectric substrate, and a surface of the third region is located away from a surface of the piezoelectric substrate to form a space for the excitation electrode to vibrate. |
申请公布号 |
US2014354114(A1) |
申请公布日期 |
2014.12.04 |
申请号 |
US201414290746 |
申请日期 |
2014.05.29 |
申请人 |
TAIYO YUDEN CO., LTD. |
发明人 |
MORIYA Akira;KAWACHI Osamu |
分类号 |
H03H9/10;H03H3/02;B06B1/06 |
主分类号 |
H03H9/10 |
代理机构 |
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代理人 |
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主权项 |
1. An acoustic wave device comprising:
a support substrate; a piezoelectric substrate located on the support substrate so that a surface of an outer peripheral portion of the support substrate is exposed; an excitation electrode located on the piezoelectric substrate and exciting an acoustic wave; and a cap substrate located on the support substrate and the piezoelectric substrate and made of an inorganic insulating material, wherein the cap substrate includes a first region located along an outer peripheral portion of the cap substrate, a second region located along an inside of the first region and having a thickness less than a thickness of the first region, and a third region located inside the second region and having a thickness less than a thickness of the second region, and a surface of the first region is bonded to the surface of the outer peripheral portion of the support substrate, a surface of the second region is bonded to a surface of an outer peripheral portion of the piezoelectric substrate, and a surface of the third region is located away from a surface of the piezoelectric substrate to form a space for the excitation electrode to vibrate. |
地址 |
Tokyo JP |