| 摘要 |
<p>The present invention suppresses a decrease in condensation drying efficiency, and reduces the failure of a coating film. A drying apparatus (1) is provided with a condenser plate (11) facing a coating film of a substrate (f1), and dries said coating film by condensing solvent vapor from the coating film using the condenser plate (11). The coating film contains a silicon compound that produces silane gas, and is provided with a flat recovery member (13), which is positioned so as to face the coating film on the substrate (f1), as a recovery means for recovering the silane gas produced from the coating film before the condenser plate (11) dries.</p> |
