| 摘要 |
<p>Provided is a method for generating a graphene, whereby the number of carbon atom layers of a generated graphene can be reliably controlled. A laser-beam heating device (10), wherein an infrared laser beam (L) is emitted from a laser beam emission unit (13) to a catalyst metal layer (38) of a wafer (W) mounted on a mounting stage (12), and a gas mixture including a carbon-containing gas is supplied to the catalyst metal layer (38) from a gas supply unit (14), after which emission of the infrared laser beam (L) to the catalyst metal layer (38) is stopped and the catalyst metal layer (38) is rapidly cooled.</p> |
