| 发明名称 |
CALIBRATION BLOCK FOR MEASURING WARPAGE, WARPAGE MEASURING APPARATUS USING THE SAME, AND METHOD THEREOF |
| 摘要 |
Disclosed herein are a calibration block for measuring warpage, a warpage measuring apparatus using the same, and a method thereof. The calibration block includes a substrate having one planar surface; and a stepped part forming a step at the center of the other surface of the substrate. |
| 申请公布号 |
US2014354797(A1) |
申请公布日期 |
2014.12.04 |
| 申请号 |
US201414182186 |
申请日期 |
2014.02.17 |
| 申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
Woo Seung Wan;Nam Ju Wan;Hwang Young Nam;Lee Kyung Ho;Ham Suk Jin |
| 分类号 |
G06T7/00;G01B11/25 |
主分类号 |
G06T7/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A calibration block for measuring warpage, comprising:
a substrate having one planar surface; and a stepped part forming a step at the center of the other surface of the substrate. |
| 地址 |
Suwon-si KR |
