MULTI-LAYER COMPOSITE BACKPLATE FOR MICROMECHANICAL MICROPHONE
摘要
A MEMS device. The device includes a membrane, and a reinforced backplate having a plurality of openings. The reinforced backplate include a first layer, and a second layer coupled to the first layer.
申请公布号
WO2014193954(A1)
申请公布日期
2014.12.04
申请号
WO2014US39793
申请日期
2014.05.28
申请人
ROBERT BOSCH GMBH;ZINN, JOHN, W.;DIAMOND, BRETT, MATHEW
