| 摘要 |
PROBLEM TO BE SOLVED: To provide a particle analysis method and a particle analyzer which are able to analyse various types of secondary particles that are conventionally difficult to be analysed, with a simple apparatus that does not require a precise and complicated device such as a primary particle pulsing device and an operation of the device.SOLUTION: The particle analysis method includes: an irradiation step of irradiating a sample with primary particles; a first detection step of allowing secondary particles emitted from an irradiated surface by the primary particles or from a surface opposite to the irradiated surface by the primary particles of the sample and utilized as an analysis object, to fly at a constant distance, and of detecting as a first detection signal the secondary particles as the analysis object; a second detection step of detecting as a second detection signal particles or photons emitted from a surface opposite to a sample surface from which the secondary particles as the analysis object are emitted; and a counting step of counting the secondary particles as the analysis object using the first detection signal and the second detection signal. |
