PRESSURE SENSOR

摘要

A microelectromechanical pressure sensor structure comprises a planar base, side walls and a diaphragm plate, attached to each other to form a hermetically closed gap that provides a reference pressure. The diaphragm plate extends along a planar inner surface on top of the side walls, and has an outer surface on the opposite side of the diaphragm plate. At least part of the outer surface of the diaphragm plate forms a planar part that includes a recess, a depth of which extends parallel to the side walls and is less than the nominal thickness of the diaphragm. A large part of reasons causing the different bending of the diaphragm and the underlying structures can be eliminated with one or more recesses arranged to the pressure sensor structure.

主权项

1. A microelectromechanical pressure sensor structure that comprises a planar base, side walls and a diaphragm plate, wherein
the side walls extend circumferentially to a first distance away from the planar base; the diaphragm plate has a planar inner surface that extends on top of the side walls, and an outer surface opposite the inner surface on the diaphragm plate; the planar base, the side walls and the diaphragm plate are attached to each other; a top edge of inner surfaces of the side walls forms a periphery of a diaphragm, a nominal thickness of the diaphragm equals to the distance from the inner surface to the outer surface of the diaphragm plate at the periphery of the diaphragm; the outer surface of the diaphragm plate includes a planar surface part that includes a periphery of a recess, a depth of which extends parallel to the side walls and is less than the nominal thickness of the diaphragm.