MULTIVARIATE YIELD CALCULATOR FOR WAFER INTEGRATED CIRCUIT FABRICATION AND METHOD OF USE THEREOF

摘要

A multivariate yield calculator for wafer integrated circuit (IC) fabrication and a method of generating a multivariate yield forecast using the multivariate yield calculator. One embodiment of the multivariate yield calculator includes: (1) a Gaussian computer configured to compute a mean vector and a covariance matrix from multivariate performance characterizations having a multivariate distribution over a plurality of wafer ICs, and (2) an integrator configured to integrate a probability distribution function (PDF) based on the mean vector and the covariance matrix over a multivariate performance bin, thereby generating a multivariate yield forecast.

主权项

1. A multivariate yield calculator, comprising:
a Gaussian computer configured to compute a mean vector and a covariance matrix from multivariate performance characterizations having a multivariate distribution over a plurality of wafer integrated circuits (ICs); and an integrator configured to integrate a probability distribution function (PDF) based on said mean vector and said covariance matrix over a multivariate performance bin, thereby generating a multivariate yield forecast.