发明名称 |
ELECTROSTATIC CHUCK |
摘要 |
An electrostatic chuck includes: a ceramic dielectric substrate having a first major surface and a second major surface; an electrode interposed between the first and second major surfaces; and a connecting part connected to the electrode and including a first region in contact with the electrode, with a first direction being defined as a direction from the first major surface toward the second major surface, and a second direction being defined as a direction orthogonal to the first direction, the first region being configured so that in a cross section of the electrode and the connecting part as viewed in the second direction, an angle on a side of the connecting part between an extension line along outer shape on the side of second major surface of the electrode and a tangential line of outer shape of the connecting part gradually increases in the first direction. |
申请公布号 |
US2014355170(A1) |
申请公布日期 |
2014.12.04 |
申请号 |
US201214345279 |
申请日期 |
2012.09.27 |
申请人 |
TOTO LTD. |
发明人 |
Wada Takuma;Anada Kazuki |
分类号 |
H01L21/683 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
1. An electrostatic chuck comprising:
a ceramic dielectric substrate having a first major surface for mounting an object to be clamped and a second major surface on opposite side from the first major surface; an electrode interposed between the first major surface and the second major surface of the ceramic dielectric substrate; and a connecting part connected to the electrode on a side of the second major surface of the electrode in the ceramic dielectric substrate and including a first region in contact with the electrode, with a first direction being defined as a direction from the first major surface toward the second major surface, and a second direction being defined as a direction orthogonal to the first direction, the first region being configured so that in a cross section of the electrode and the connecting part as viewed in the second direction, an angle on a side of the connecting part between an extension line along outer shape on the side of second major surface of the electrode and a tangential line of outer shape of the connecting part gradually increases in the first direction. |
地址 |
KITAKYUSHU-SHI, FUKUOKA JP |