发明名称 PROCESSING METHOD OF WIRING BOARD, AND WIRING BOARD PRODUCED USING THE METHOD
摘要 PROBLEM TO BE SOLVED: To provide a processing method of a wiring board which prevents side etching of a wiring pattern (electrolytic copper).SOLUTION: The processing method comprises: a first step where, in a semi-additive method, a substrate including electroless copper as a seed layer and electrolytic copper as a wiring pattern is contacted with a liquid composition for an etching pretreatment containing chloride ions; and a subsequent second step where the treated wiring board is etched by a liquid composition for etching containing hydrogen peroxide, sulfuric acid, tetrazoles, chloride ions, copper ions, and water.
申请公布号 JP2014224316(A) 申请公布日期 2014.12.04
申请号 JP20140088209 申请日期 2014.04.22
申请人 MITSUBISHI GAS CHEMICAL CO INC;HISHIE KAGAKU KK 发明人 SUZUKI TOMOKO;TASHIRO NORIFUMI;NAITO YUKIHIDE;KAZUSATO AKARI
分类号 C23F1/18;C23F1/00;H05K3/06;H05K3/18 主分类号 C23F1/18
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