SILICA GLASS CRUCIBLE AND METHOD FOR PRODUCING MONOCRYSTALLINE SILICON USING SAME

摘要

Buckling of a vitreous silica crucible or fall of a sidewall into the crucible is effectively suppressed. Furthermore, dislocations in a silicon single crystal are suppressed to enhance the yield of the single crystal. The vitreous silica crucible is used to pull single-crystal silicon and includes the cylindrical sidewall having an upward-opening rim, a mortar-shaped bottom including a curve, and a round portion connecting the sidewall and the bottom. The round portion is provided in such a manner that the curvature of the inner surface thereof is gradually increased from the sidewall toward the bottom in a section passing through the rotation axis of the vitreous silica crucible.

主权项

1. A vitreous silica crucible used to pull single-crystal silicon, comprising:
a cylindrical sidewall having an upward-opening rim; a mortar-shaped bottom including a curve; and a round portion connecting the sidewall and the bottom, wherein the round portion is provided in such a manner that a curvature of an inner surface thereof is gradually increased from the sidewall toward the bottom in a section passing through a rotation axis of the vitreous silica crucible.