发明名称 LASER DEVICE AND METHOD FOR CONTROLLING ACTUATOR
摘要 A laser device (100) may include: laser resonators (20, 30) configured so as to output a pulse laser beam (L); actuators (35, 36, 37) configured so as to change the wavelength of the pulse laser beam; and a control unit (110) configured so as to receive target wavelength data for a plurality of pulses of the pulse laser beam prior to the pulse laser being being outputted, and to control the actuators, on the basis of the target wavelength data for the plurality of pulses, such that the wavelength of the pulse laser beam approaches the target wavelength data .
申请公布号 WO2014192704(A1) 申请公布日期 2014.12.04
申请号 WO2014JP63881 申请日期 2014.05.26
申请人 GIGAPHOTON INC. 发明人 MATSUNAGA, TAKASHI;KUMAZAKI, TAKAHITO;ISHIDA, KEISUKE;WAKABAYASHI, OSAMU
分类号 H01S3/137 主分类号 H01S3/137
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