摘要 |
A laser device (100) may include: laser resonators (20, 30) configured so as to output a pulse laser beam (L); actuators (35, 36, 37) configured so as to change the wavelength of the pulse laser beam; and a control unit (110) configured so as to receive target wavelength data for a plurality of pulses of the pulse laser beam prior to the pulse laser being being outputted, and to control the actuators, on the basis of the target wavelength data for the plurality of pulses, such that the wavelength of the pulse laser beam approaches the target wavelength data . |