IMPRINT METHOD, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a technique advantageous in accurately aligning a mold and a substrate.SOLUTION: An imprint method for transferring a pattern on an imprint material includes: a deformation step of deforming a pattern surface into a convex shape warped toward a substrate by applying a force to a mold so that the mold can be gradually brought into contact with the imprint material outward from a central portion of the pattern surface; an obtaining step of obtaining a shift amount indicating how much a mark on the mold shifts in a direction parallel to a substrate surface due to deformation of the pattern surface; a detection step of detecting the mark on the mold and a mark on the substrate while the pattern surface is deformed, and obtaining relative positions of the mold and the substrate from a detection result; and an alignment step of aligning the mold and the substrate using the shift amount and the relative positions so that the mark on the mold and the mark on the substrate are overlapped each other when deformation of the pattern surface has become small and thus the shift amount has become also small.