| 摘要 |
To provide a surface property inspection apparatus, surface property inspection system, and surface property inspection method capable of inspecting the surface processing state of processed material subjected to surface processing such as shot-peening, heat treatment, or nitriding with high accuracy and low vulnerability to temperature changes in the inspection environment. Surface property inspection apparatus 1 is furnished with a AC power supply 10, a AC bridge circuit 20, and a evaluation device 30; AC bridge circuit 20 comprises variable resistor 21 with which distribution ratio γ is variable, reference detector 22, and inspection detector 23. Inspection detector 23 is furnished with a coil 23b wound so as to oppose the surface property inspection region of object under inspection M, and by supplying AC power from AC power supply 10 to coil 23b, an eddy current is excited in object under inspection M. Thus the magnetic properties of object under inspection M can be detected, and inspection of surface properties based on the output signal from AC power supply 10 is possible. |
