SAMPLE HOLDER FOR ELECTRON MICROSCOPE

摘要

A sample holder for an electron microscope has multiple sample stands, can allow at least one sample stand to move, and enables multiple samples for a transmission electron microscope to be prepared by a focused ion beam apparatus. A holder tip opening is provided in a tip of the sample holder. A back end of the sample holder has a knob, a rolling mechanism, a coarse adjustment mechanism, and a connector. By pressing the knob, fixation of the rolling mechanism is canceled, and the back end from the rolling mechanism and the tip of the sample holder will rotate. This rolling mechanism enables arrangement of the samples to be rotated in both the observing of a sample and the preparing of a sample for a transmission electron microscope with the focused ion beam apparatus. Moreover, the sample stand is movable by the coarse adjustment mechanism and the fine adjustment mechanism.

主权项

1. A sample holder for a charged particle beam apparatus for supporting a sample that is observed by a charged particle beam apparatus,
comprising: a sample stage on which a sample stand can be installed; a sample driving part capable of moving the sample stand; and a rolling mechanism for rotating a tip of the sample holder, wherein the sample driving part rotates accompanied with rotation of the rolling mechanism.