METHOD OF PRODUCING GRAPHENE FILM

摘要

PROBLEM TO BE SOLVED: To remove catalyst metal without damage to graphene.SOLUTION: After forming a first metal layer 2 on an insulating film 10, a graphene layer 1 is formed on the first metal layer 2. The graphene layer 1 and the first metal layer 2 are patterned, and then the first metal layer 2 is subjected to oxidation and sublimation in an oxidation atmosphere, so that the first metal layer 2 can be removed.