摘要 |
A control circuit measures fluctuations in the energy of a pulse laser with respect to the power of an RF signal by varying the power of the RF signal, determines the minimum power of the RF signal which yields a permissible level of fluctuation, and sets the power of the RF signal based on the minimum power of the RF signal. Heat generation in the RF signal generation circuit can be suppressed, and the overall power consumption can also be reduced. It is also possible to reduce the time from when the RF signal is turned on until the RF signal is turned off. As a result, it is possible to generate a stable pulse laser. |