METHOD OF MAKING MICROWAVE AND MILLIMETERWAVE ELECTRONIC CIRCUITS BY LASER PATTERNING OF UNFIRED LOW TEMPERATURE CO-FIRED CERAMIC (LTCC) SUBSTRATES

摘要

Disclosed are methods of using a laser to pattern unfired, screen printed metallization on unfired (green) LTCC tape material by a subtractive process especially on the internal layers of an LTCC circuit.

主权项

1. A method to provide metalized conductor patterns comprising:
a. forming thick film metallization on an LTCC tape layer; b. establishing laser control parameters corresponding to the thick film metallization on the LTCC tape layers for a laser device; c. ablating the thick film metallization on the LTCC tape layers by the laser device in a defined design pattern on the thick film metallization on LTCC tape layers of a line width greater than 1 mil, wherein the thick film metallization on the LTCC tape layers is unfired.