| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a heat sealing device which enables accurate alignment between an upper sheet material and a lower sheet material and which can reduce a thermal impact on a sealed object to be enclosed in a closed space as much as possible when the sealed object is sandwiched between the upper and lower sheet materials, and the upper and lower sheet materials are heat-bonded together so that the sealed object is enclosed in the closed space between the sheet materials. <P>SOLUTION: A heat sealing device comprises heating means with an annular heating part, and in the heat sealing device a sealed object is sandwiched between upper and lower sheet materials, and the upper and lower sheet materials are heat-bonded together outside the periphery of the sealed object by the annular heating part so as to form an annular sealing part, and the sealed object is enclosed in a closed space thus formed. An electrostatic chuck having an internal electrode layer, a dielectric layer and a heat insulation layer is arranged inside the annular heating part, and when the sheet materials are heat-bonded, the upper sheet material is adsorbed by the dielectric layer and fixed while a part of heat conduction to the sealed object is blocked by the heat insulation layer. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
