发明名称 インターポーザーの製造方法
摘要 <p>There is provided an interposer which meets the need of improving electrical reliability of an electronic device. An interposer includes a substrate including a penetrating-hole in a thickness direction thereof, and a penetrating conductor disposed in the penetrating-hole. The substrate includes a first insulating layer and a second inorganic insulating layer which are separated from each other in the thickness direction, and a first resin layer interposed between the first inorganic insulating layer and the second inorganic insulating layer and being in contact with the first inorganic insulating layer and the second inorganic insulating layer. A coefficient of thermal expansion of the first resin layer in thickness and planar directions thereof is larger than those of the first inorganic insulating layer and the second inorganic insulating layer.</p>
申请公布号 JP5635657(B2) 申请公布日期 2014.12.03
申请号 JP20130142104 申请日期 2013.07.05
申请人 发明人
分类号 H05K3/46;H01L23/32;H05K3/40 主分类号 H05K3/46
代理机构 代理人
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