| 发明名称 |
METHOD FOR PRODUCING ELECTRICALLY SEMICONDUCTIVE OR CONDUCTIVE LAYERS WITH IMPROVED CONDUCTIVITY |
| 摘要 |
The invention relates to a process for the production of electrically semiconducting or conducting metal-oxide layers having improved conductivity which is suitable, in particular, for the production of flexible thin-film transistors, to metal-oxide layers produced thereby, and to the use thereof for the production of electronic components. |
| 申请公布号 |
EP2807670(A1) |
申请公布日期 |
2014.12.03 |
| 申请号 |
EP20130701564 |
申请日期 |
2013.01.10 |
| 申请人 |
MERCK PATENT GMBH |
发明人 |
HAEMING, MARC;KLYSZCZ, ANDREAS;BONRAD, KLAUS;KIRSCH, PEER;ISSANIN, ALEXANDER;WALKER, DANIEL |
| 分类号 |
H01L21/02;H01L21/368 |
主分类号 |
H01L21/02 |
| 代理机构 |
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