| 摘要 |
PROBLEM TO BE SOLVED: To highly accurately and quickly measure an angle of rotation. SOLUTION: An angle measurement system includes: a rotary encoder 2 for detecting a relative angle of rotation of a rotary shaft 3 to an encoder main body 2a; and a non-contact angle detection means 20 (laser interference-type detection means) separated from the encoder main body 2a and the rotary shaft 3 for detecting the angle of rotation of the encoder main body 2a. Thus, it is possible to correct the angle of rotation detected by the rotary encoder 2 on the basis of the angle of rotation detected by the non-contact angle detection means 20, and to highly accurately and quickly measure the angle of rotation. COPYRIGHT: (C)2013,JPO&INPIT |
