摘要 |
A bump-joining pad (61) is provided to the upper surface of a substrate (45), and a bump (70) of a circuit element (43) is connected to the bump-joining pad. The bump-joining pad (61) is connected to a substrate-side joining section (69) provided to a surface facing a cover by a pattern wiring (64). A microphone chip (42) is mounted on the lower surface of the cover (44). A first joining pad (a bonding pad (48), a cover-side joining section (49)) is provided to a surface of the cover (44) facing the substrate (45), and the microphone chip (42) is connected to the first joining pad by a bonding wire (50). The first joining pad of the cover (44) and the substrate-side joining section (69) of the substrate (45) are joined by a conductive material (65), and as a result, the microphone chip (42) and the circuit element (43) are electrically connected. |