| 摘要 |
Provided is a technique capable of keeping a tilt angle constant even in a case where a warp in a direction along a tilting axis occurs on a tilting plate in a MEMS device which includes the tilting plate tilting with respect to a substrate. A MEMS device disclosed in the present description includes a substrate, a tilting plate arranged at an interval from the substrate, a support member fixed to the substrate, and a support beam having a first end connected to the support member and a second end connected to the tilting plate, and tiltably supporting the tilting plate around a tilting axis. In the MEMS device, one of the substrate and the tilting plate is formed with a protruding portion. In the MEMS device, at least a part of the protruding portion is included in a plane perpendicular to the tilting axis, and including a connecting portion of the tilting plate and the support beam. In the MEMS device, the at least a part of the protruding portion comes into contact with the other of the substrate and the tilting plate, when the tilting plate tilts. |
