| 摘要 |
<p>The present invention relates to a low frequency air plasma device for biomedical application that is capable of adjusting a temperature of an air gas to control an amount of ozone generated from plasma, thereby being stably used in a large-area low frequency air plasma device for biomedical application. The low frequency air plasma device for biomedical application includes: a heat generator disposed on each of a bulk layer and a ground electrode layer that are successively stacked on each other to adjust a temperature of an air gas, thereby controlling an amount of ozone generated from plasma; the bulk layer attached on a top surface of the heat generator to transmit the heat generated from the heat generator to a plasma generating module; and a ground electrode layer deposited on the bulk layer; and the plasma generating module having a dielectric layer and a power electrode layer that are successively stacked on the ground electrode layer and generating plasma.</p> |
