发明名称 直流電源装置、直流電源装置の制御方法
摘要 Intermittent short-circuit control is performed in the ignition mode, thereby allowing short-circuit current to flow in the current source step-down type chopper. Energy of the short-circuit current is temporarily accumulated in the inductor provided in the current source step-down type chopper. The accumulated energy boosts the output voltage from the direct current power supply device during the period until the next short circuiting, via the current, the multiphase inverter, and the rectifier. The voltage boosting operation where accumulation of the current energy by short circuiting and boosting of the output voltage by conduction are repeated, controls an increase of the output voltage which is applied to the plasma generator.
申请公布号 JP5634626(B2) 申请公布日期 2014.12.03
申请号 JP20130555675 申请日期 2012.09.07
申请人 株式会社京三製作所 发明人 譲原 逸男;安達 俊幸;小玉 真一
分类号 H05H1/46;C23C14/34;C23C16/503;H01L21/205;H01L21/3065 主分类号 H05H1/46
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