| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a neutralizing dust removal apparatus which exhibits extremely high neutralizing and dust removing effect and efficiency of charged particles adhering to a cleaned object while eliminating the problems of expensive facility cost when providing an air shower room, and lowering of work efficiency in a clean room, and to provide a neutralizing dust removal method. <P>SOLUTION: In a neutralizing dust removal apparatus 10 that neutralizes a charged particle p1 adhering to a cleaned object and removing dust, an air cannon 3 generating an air mass and an ionizer 2 are configured integrally. After ions are generated by the ionizer 2, an air mass is generated by the air cannon 3 and the ions are blown by the air mass. The ions thus blown neutralize the charged particle p1 to produce a non-charged particle p2, which is then blown by the air mass thus removing dust. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
