发明名称 |
ORIENTATION ADJUSTMENT DEVICE, AND ORIENTATION ADJUSTMENT METHOD |
摘要 |
A clean stocker (100) including an orientation adjustment device includes: a pivot device which pivots a placing base; a reticle carrier device (120) which holds an article without changing an orientation of the article; and a controller (180) which controls the pivot device and the reticle carrier device (120), wherein the controller (180) causes: the article to be held in a state in which the article is separate from the placing base held by the pivot device; the placing base in the state in which the article is separate therefrom to be pivoted from an initial position to an intended position; the article to be placed on the placing base which has been pivoted to the intended position; and the placing base having the article placed thereon to be pivoted from the intended position to the initial position. |
申请公布号 |
EP2706564(A4) |
申请公布日期 |
2014.12.03 |
申请号 |
EP20120779355 |
申请日期 |
2012.03.13 |
申请人 |
MURATA MACHINERY, LTD. |
发明人 |
GAMBE, MASAHIKO |
分类号 |
H01L21/68;B65G1/00;B65G1/04;B65G47/90;B65G49/06;H01L21/677 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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