发明名称 ORIENTATION ADJUSTMENT DEVICE, AND ORIENTATION ADJUSTMENT METHOD
摘要 A clean stocker (100) including an orientation adjustment device includes: a pivot device which pivots a placing base; a reticle carrier device (120) which holds an article without changing an orientation of the article; and a controller (180) which controls the pivot device and the reticle carrier device (120), wherein the controller (180) causes: the article to be held in a state in which the article is separate from the placing base held by the pivot device; the placing base in the state in which the article is separate therefrom to be pivoted from an initial position to an intended position; the article to be placed on the placing base which has been pivoted to the intended position; and the placing base having the article placed thereon to be pivoted from the intended position to the initial position.
申请公布号 EP2706564(A4) 申请公布日期 2014.12.03
申请号 EP20120779355 申请日期 2012.03.13
申请人 MURATA MACHINERY, LTD. 发明人 GAMBE, MASAHIKO
分类号 H01L21/68;B65G1/00;B65G1/04;B65G47/90;B65G49/06;H01L21/677 主分类号 H01L21/68
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